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Rev. 4/19/11
Today’s News
The world’s first 3-D Tri-Gate transistors on a production technology
New 22nm transistors have an unprecedented combination of power savings and
performance gains.
These benefits will enable new innovations across a broad range of devices from
the smallest handheld devices to powerful cloud-based servers.
The transition to 3-D transistors continues the pace of technology advancement,
fueling Moore’s Law for years to come.
The world’s first demonstration of a 22nm microprocessor -- code-named Ivy Bridge
-- that will be the first high-volume chip to use 3-D Tri-Gate transistors.
Energy-Efficient Performance Built on Moore’s Law
1
65nm 45nm 32nm 22nm
1x (normalized)
Leakage Power
Transistor Transistor
0.1x Active per
Lower >
Lower50% 0.01x Power reduction
Active
0.001x Constant Performance
0.1 65nm 45nm 32nm 22nm
Higher Transistor Performance (Switching Speed) Planar Planar Planar Tri-Gate
Source: Intel 22 nm Tri-Gate transistors increase the benefit
from a new technology generation
Source: Intel
Transistor Innovations Enable Technology Cadence
2003
90 nm
2005
65 nm
2007
45 nm
2009
32 nm
2011
22 nm
Invented SiGe
Strained Silicon
Strained Silicon
nd
2 Gen.
SiGe
Strained Silicon
Invented
Gate-Last
High-k Metal Gate
nd
2 Gen.
Gate-Last
High-k Metal Gate
First to
Implement Tri-Gate
High k Metal gate
Tri-Gate
Transistor Innovations Enable Cost Benefits
of Moore’s Law to Continue
1
0.1
$ / Transistor
(relative to 0.35um)
0.01
200mm
300mm
Source: Intel
0.001 .35um .25um .18um .13um 90nm 65nm 45nm 32nm 22nm 14nm 10nm
22 nm Manufacturing Fabs
D1D -- Oregon
D1C -- Oregon
Fab 32 -- Arizona
Fab 28 -- Israel Fab 12 -- Arizona
22nm upgrades to be completed 2011-12
Tri-Gate Invented
Tri-Gate Achievement Results from
Long Term Commitment to Research
Pathfinding
Internal
Research Development
Tri-Gate Selected for
22nm node
CE! transfer
Manufacturing
Tri-Gate Mfg
Single-fin transistor demonstrated
Multi-fin transistor demonstrated
Tri-gate SRAM cells
demonstrated
Tri-gate RMG
process flow
developed
Tri-gate optimized
for HVM
Bringing innovative technologies to HVM is the result of a
highly coordinated internal research-development-manufacturing pipeline
“For years we have seen limits to how small transistors can get,”
said Gordon E. Moore. “This change in the basic structure is
a truly revolutionary approach, and one that should allow
Moore’s Law, and the historic pace of innovation, to continue.”
22 nm 3-D Tri-Gate Transistor
Source: Intel
3-D Tri-Gate transistors form conducting channels on three sides
of a vertical fin structure, providing “fully depleted” operation
Transistors have now entered the third dimension!
22 nm 3-D Tri-Gate Transistor
Source: Intel
Gates
Fins
32 nm Planar Transistors
22 nm Tri-Gate Transistors
Source: Intel
Std vs. Fully Depleted
Read the full Risk Factors.